Nanostructure light emitting device and method of manufacturing the same

ABSTRACT

A nanostructure semiconductor light emitting device includes a base layer, an insulating layer, and a plurality of light emitting nanostructures. The base layer includes a first conductivity type semiconductor. The insulating layer is disposed on the base layer and has a plurality of openings through which regions of the base layer are exposed. The light emitting nanostructures are respectively disposed on the exposed regions of the base layer and include a plurality of nanocores having a first conductivity type semiconductor and having side surfaces provided as the same crystal planes. The light emitting nanostructures include an active layer and a second conductivity type semiconductor layer sequentially disposed on surfaces of the nanocores. Upper surfaces of the nanocores are provided as portions of upper surfaces of the light emitting nanostructures, and the upper surfaces of the light emitting nanostructures are substantially planar with each other.

TECHNICAL FIELD

The present disclosure relates to a nanostructure semiconductor light emitting device and a method of manufacturing the same.

BACKGROUND OF THE INVENTION

A semiconductor light emitting device such as a light emitting diode (LED), a device including materials emitting light, may convert energy generated through the recombination of electrons and electron holes in a junction semiconductor into light to be emitted therefrom. Light emitting diodes are widely used in lighting devices and display devices and as lighting sources, and the development thereof has therefore been accelerated.

Recently, a semiconductor light emitting device having a nanostructure in order to increase luminous efficiency through improved crystallinity and an increased light emitting area, and a manufacturing technique thereof have been suggested. A semiconductor light emitting device having a nanostructure may generate a relatively low amount of heat and may have an increased surface area due to the nanostructure, such that a light emitting area thereof may be increased to enhance luminous efficiency. In addition, an active layer may be obtained from a non-polar surface or an anti-polar surface to prevent luminous efficiency from being deteriorated due to polarization, thereby improving droop characteristics.

DETAILED DESCRIPTION OF THE INVENTION Technical Problems

An aspect of the present disclosure provides a nanostructure semiconductor light emitting device having stable luminous efficiency by utilizing advantages provided by a nanostructure, and a method of manufacturing the same.

Technical Solutions

According to an aspect of the present disclosure, there is provided a nanostructure semiconductor light emitting device including: a base layer formed of a first conductivity type semiconductor; an insulating layer disposed on the base layer and having a plurality of openings through which regions of the base layer are exposed; and a plurality of light emitting nanostructures respectively disposed on the exposed regions of the base layer and including nanocores formed of a first conductivity type semiconductor and having side surfaces provided as the same crystal planes, and an active layer and a second conductivity type semiconductor layer sequentially disposed on surfaces of the nanocores, wherein upper surfaces of the nanocores are provided as portions of upper surfaces of the light emitting nanostructures, and the upper surfaces of the light emitting nanostructures are substantially planar surfaces.

The side surfaces of the nanocores may be same crystal planes and the active layer may be disposed only on the side surfaces of the nanocores.

The nanostructure semiconductor light emitting device may further include a passivation layer disposed to cover the upper surfaces of the light emitting nanostructures.

The side surfaces of the nanocores may be crystal planes perpendicular to an upper surface of the base layer. The light emitting nanostructures and the base layer may be formed of a nitride single crystal, and the side surfaces of the nanocores may be non-polar m-planes.

A portion of nanocores among a plurality of the nanocores may have cross-sectional areas different from those of a remainder of nanocores among the plurality of the nanocores. A portion of nanocores among a plurality of the nanocores may have an interval therebetween different from those of a remainder of nanocores among the plurality of the nanocores.

According to another aspect of the present disclosure, there is provided a method of manufacturing a nanostructure semiconductor light emitting device, the method comprising: preparing a plurality of nanocores selectively grown on a base layer formed of a first conductivity type semiconductor, using a first conductivity type semiconductor, each nanocore including a main part providing a side surface having a first crystal plane in a growth direction and an upper part providing a surface having a second crystal plane different from the first crystal plane; forming a plurality of light emitting nanostructures by sequentially growing an active layer and a second conductivity type semiconductor layer on the surfaces of the respective nanocores; forming a contact electrode on a surface of the second conductivity type semiconductor layer; and planarizing a surface of the resultant product on which the contact electrode is disposed, so as to remove a portion of the active layer disposed on the second crystal plane.

The preparing of the plurality of nanocores may include: providing the base layer formed of the first conductivity type semiconductor; forming a mask including an etch stop layer, on the base layer; forming a plurality of openings through which regions of the base layer are exposed, in the mask; forming a plurality of nanocores by growing the first conductivity type semiconductor on the exposed regions of the base layer so as to fill the plurality of openings with the first conductivity type semiconductor; and partially removing the mask by using the etch stop layer to expose the side surfaces of the plurality of nanocores.

The mask may include a first material layer disposed on the base layer and serving as the etch stop layer and a second material layer disposed on the first material layer and having an etching rate lower than that of the first material layer.

The mask may include first to third material layers sequentially disposed on the base layer; and the second material layer may be formed of a material different from those of the first and third materials and may serve as the etch stop layer.

The method may further include heat treating the plurality of nanocores between the partially removing of the mask and the sequentially growing of the active layer and the second conductivity type semiconductor layer.

The heat treating of the plurality of nanocores maybe performed at a temperature ranging from 800 to 1200° C.

The method may further include applying a planarizing process to upper surfaces of the plurality of nanocores to be planarized to have the same level, after the forming of the plurality of nanocores.

At least a portion of nanocores among the plurality of nanocores may have cross-sectional areas or an interval therebetween different from those of a remainder of nanocores among the plurality of the nanocores.

Effects of the Invention

According to embodiments of the present inventive concept, even in the case of using a nanostructure, an active layer may be grown on the same crystal planes, such that uniform luminescence properties may be obtained in the overall region of the active layer.

In addition, even in a case in which a growth height of a nanostructure is different due to uneven deposition according to regions thereof in a crystal growth process, since a planarizing process may be easily used therein, a uniform height of a final nanostructure maybe secured. In particular, such a process may be usefully used in differentiating cross-sectional areas of nanostructures and an interval therebetween in order to implement multiple wavelengths of light, for example, white light.

The solutions and the effect of the present invention have been described and have been limited to them. The above and other aspects, features and other advantages will be more clearly understood from the following embodiments.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a side cross-sectional view of a nanostructure semiconductor light emitting device according to an embodiment of the present inventive concept;

FIGS. 2A and 2B are views respectively illustrating examples of a nanocore employed in the embodiment of the present inventive concept;

FIGS. 3A through 3D are cross-sectional views illustrating respective main processes of a method of manufacturing a nanostructure semiconductor light emitting device according to an embodiment of the present inventive concept;

FIGS. 4A through 4D are cross-sectional views illustrating respective main processes of an electrode formation process for a resultant product resulting from FIG. 3D;

FIGS. 5A through 5H are cross-sectional views illustrating respective main processes of a method of manufacturing a nanostructure semiconductor light emitting device according to another embodiment of the present inventive concept;

FIGS. 6A and 6B are mimetic diagrams respectively showing heat treatment processes applied to FIGS. 5D and 5E;

FIGS. 7A through 7F are cross-sectional views illustrating respective main processes of a method of manufacturing a nanostructure semiconductor light emitting device according to another embodiment of the present inventive concept (a planarizing process introduction); and

FIGS. 8A and 8B are side cross-sectional views respectively illustrating shapes of an opening that may be formed in a mask employed in the embodiment of the present inventive concept.

DETAILED DESCRIPTION OF THE EMBODIMENTS

Hereinafter, embodiments will be described in detail with reference to the accompanying drawings.

The embodiment may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the inventive concept to those skilled in the art. In the drawings, the shapes and dimensions of elements may be exaggerated for clarity, and the same reference numerals will be used throughout to designate the same or like elements.

FIG. 1 is a side cross-sectional view of a nanostructure semiconductor light emitting device according to an embodiment of the present inventive concept.

As illustrated in FIG. 1, a nanostructure semiconductor light emitting device 10 according to the present embodiment may include a base layer 12 formed of a first conductivity type semiconductor material and a plurality of light emitting nanostructures 15 formed on the base layer 12.

The base layer 12 may be formed on a substrate 11 and provide a growth surface for the light emitting nanostructures 15, as well as serving to electrically connect one polarities of the plurality of light emitting nanostructures 15.

The substrate 11 may be an insulating substrate, a conductive substrate or a semiconductor substrate. For example, the substrate 11 may be formed of sapphire, SiC, Si, MgAl₂O₄, MgO, LiAlO₂, LiGaO₂, or GaN. The base layer 12 may be a nitride semiconductor satisfying Al_(x)In_(y)Ga_(1-x-y)N (0≦x≦1, 0≦y≦0, 0≦x+y≦1) and may be doped with n-type impurities such as silicon (Si) so as to have a specific conductivity type.

An insulating layer 13 having openings H may be formed on the base layer 12, and the openings H may be provided for growth of the light emitting nanostructures 15. The base layer 12 may be exposed through the openings H and nanocores 15 a may be formed on exposed regions of the base layer 12. The insulating layer may be used as a mask for growth of the nanocores 15 a. The insulating layer 13 may be formed of an insulating material that may be used in a semiconductor process, such as SiO₂ or SiN_(x).

The light emitting nanostructures 15 may include the nanocores 15 a formed of a first conductivity type semiconductor and an active layer 15 b and a second conductivity type semiconductor layer 15 c sequentially formed on surfaces of the nanocores 15 a.

The active layer 15 b may have a multi-quantum well (MQW) structure in which quantum well and quantum barrier layers are alternately stacked. For example, when the active layer 15 b may be formed of a nitride semiconductor, a GaN/InGaN structure may be used, but a single quantum well (SQW) structure may also be used. The second conductivity type semiconductor layer 15 c may be a crystal satisfying p-type Al_(x)In_(y)Ga_(1-x-y)N. The second conductivity type semiconductor layer 15 c may include an electron blocking layer (not shown) in a portion thereof adjacent to the active layer 15 b. The electron blocking layer (not shown) may have a multilayer structure in which a plurality of layers having different compositions of n-type Al_(x)In_(y)Ga_(1-x-y)N are stacked, or may include at least one layer composed of Al_(y)Ga_((1-y))N. The electron blocking layer (not shown) may have a greater band gap than that of the active layer 15 b to prevent electrons from flowing to the second conductivity type (p-type) semiconductor layer 15 c.

As illustrated in FIG. 1, upper surfaces of the nanocores 15 a may be provided as portions of upper surfaces of the light emitting nanostructures 15, and the upper surfaces of the light emitting nanostructures 15 may have substantially planar surfaces.

In the structure, the active layer 15 b may be present only on side surfaces of the nanocore 15 a and may not be present on the upper surface of the nanocore 15 a. Since the nanocore 15 a may be formed of a first conductivity type semiconductor as above described and the side surfaces thereof may be the same crystal planes, the active layer 15 b may be formed on the same crystal planes. Thus, a defect in which luminescence properties of the active layer 15 b are changed depending on a crystal plane may be solved. This will be described in detail with reference to FIGS. 2A and 2B.

As illustrated in FIG. 2A, the nanocore 15 b may include a main part M providing side surfaces having first crystal planes (for example, m-planes) in a growth direction and an upper part T providing a surface having a second crystal plane (for example, a c-plane) different from the first crystal planes.

When the base layer 12 is a nitride single crystal including an upper surface having a c-plane, the side surfaces of the main part M may be crystal planes perpendicular to the growth surface of the base layer 12, that is, non-polar surfaces (m-planes) and the upper surface of the upper part T may have a c-plane perpendicular to the m-planes. In this manner, the surfaces of the nanocore 15 a may be configured of a plurality of different crystal planes. Thus, even in the case in which the active layer 15 b is grown on the surfaces of the nanocore 15 a through the same process, a composition of the active layer 15 b (in particular, the content of indium) may be different due to differences in characteristics of the respective crystal planes and consequently, a wavelength of light generated in the active layer grown on the upper surface (c-plane) of the nanocore 15 a may be different from a wavelength of light generated in the active layer grown on the side surfaces (m-planes) of the nanocore 15 a. The difference in wavelengths of light may be problematic in terms of implementing uniform light having a desired wavelength.

The nanocore may have various crystal structures in view of the entirety thereof or in a portion thereof, such as a hexagonal pyramid structure as needed, and the above described defect may be generated in another structural nanocore having a plurality of different crystal planes.

For example, the above described defect may be generated in a nanocore structure illustrated in FIG. 2B in a similar manner. The nanocore illustrated FIG. 2B may include the main part M having side surfaces provided as non-polar surfaces in a growth direction and the upper part T having an upper surface provided as a anti-polar surface (a r-plane) and in this case, the upper part T of a nanocore 35 illustrated in FIG. 2B may have a hexagonal pyramid structure, unlike the case of the nanocore 15 a illustrated in FIG. 2A. Even in this case, since the nanocore may have a plurality of different crystal planes, the composition of the active layer may be different depending on the crystal planes and consequently, a wavelength of light generated in the active layer formed on the upper part T of the nanocore 15 a may be different from a wavelength of light generated in the active layer formed on the side surfaces of the nanocore 15 a.

In this manner, as illustrated in FIG. 1, since the side surfaces of the nanocore 15 a may provide the same crystal planes and the active layer 15 b may be formed only on the side surfaces of the nanocore 15 a, the occurrence of a difference in luminescence properties due to a difference in crystal planes may be prevented.

The nanostructure semiconductor light emitting device 10 according to the embodiment may include a contact electrode 16 formed in spaces between light emitting structures. As illustrated in FIG. 1, the contact electrode 16 may have an upper surface substantially coplanar with the upper surfaces of the light emitting structures 15.

A passivation layer 17 may be formed on the upper surfaces of the light emitting nanostructures 15. The passivation layer 17 may prevent the exposure and an undesired electrical connection of the active layer 15 b.

A portion of the base layer 12 formed of a first conductivity type semiconductor may be exposed and a first electrode 19 a may be formed on the exposed portion of the base layer 12. The contact electrode 16 formed between the light emitting nanostructures may be extended to a certain position above the base layer 12 and a second electrode 19 b may be formed on the extension portion of the contact electrode 16.

In this manner, in the nanostructure semiconductor light emitting device of FIG. 1, the side surfaces of the nanocore 15 a may have the same side surfaces and the active layer 15 b may be provided only on the side surfaces of the nanocore 15 a, whereby the active layer 15 b maybe formed only on the same crystal planes. Such structure maybe obtained by providing the upper surface of the nanocore 15 a as a portion of the upper surface of the light emitting nanostructure 15 and allowing the upper surface of the light emitting nanostructure 15 to have a substantially planar surface.

In this manner, a method of removing the active layer formed on the same crystal planes of the nanocore in a limited manner may be implemented using a planarizing process. FIGS. 3A through 3D are cross-sectional views illustrating respective main processes of a method of manufacturing a nanostructure semiconductor light emitting device according to an embodiment of the present inventive concept.

As illustrated in FIG. 3A, an insulating layer 23 may be formed as a mask on a base layer 22 formed of a first conductivity type semiconductor and a plurality of nanocores 25 a may be formed on exposed regions of the base layer 22.

The base layer 22 may be formed on a substrate 21 and provide a crystal growth surface for growing light emitting nanostructures thereon, as well as serving to electrically connect one polarities of the light emitting nanostructures. Thus, the base layer 22 may be formed as a semiconductor single crystal having electrical conductivity. In a case in which the base layer 22 is directly grown, the substrate 21 may be a crystal growth substrate.

The base layer 22 may be a nitride semiconductor satisfying Al_(x)In_(y)Ga_(1-x-y)N (0≦x≦1, 0≦y≦1, 0≦x+y≦1) and may be doped with n-type impurities such as silicon (Si). In this case, the substrate 21 may be formed of sapphire, SiC, Si, MgAl₂O₄, MgO, LiAlO₂, LiGaO₂, or GaN.

The insulating layer 23 may have a plurality of openings H through which regions of the base layer 22 may be exposed. The insulating layer 23 may expose the regions of the base layer 22 by forming the plurality of openings H after depositing an insulating material on the base layer 22. The insulating layer 23 may be formed of an insulating material such as SiO₂ or SiN. The openings H may have a width designed in consideration of a desired width of the light emitting nanostructures. For example, the openings H may be formed to have a width of 500 nm or less. Further, the openings H may be formed to have a width of 200 nm. Cross-sectional shapes and arrangements of the openings H may be variously formed and for example, the openings H may have various cross-sectional shapes, such as a polygonal shape, a quadrangular shape, an elliptical shape, a circular shape or the like.

The nanocores 25 a may be obtained by selectively growing a first conductivity type semiconductor using the insulating layer as a mask. The first conductivity type semiconductor of the nanocores 25 a may be an n-type nitride semiconductor and for example, may be a crystal satisfying an n-type Al_(x)In_(y)Ga_(1-x-y)N (1≦x≦1, 0≦y≦1, 0≦x+y≦1). The first conductivity type semiconductor configuring the nanocores 25 a may be identical to the first conductivity type semiconductor of the base layer 22. For example, the base layer 22 and the nanocores 25 a may be formed of an n-type GaN.

A nitride single crystal configuring the nanocores 25 a may be formed using a metal organic chemical vapor deposition (MOCVD) or a molecular beam epitaxy (MBE) and the crystal may be grown only on the regions of the base layer 12 exposed through the openings, rather than being formed on the insulating layer 23, whereby desired nanocores 25 a may be provided. The present embodiment exemplifies the nanocore having a rod shape, but is not limited thereto. For example, the nanocore may have a polypyramidal shape such as a hexagonal pyramid shape. The shape of the nanocore may be realized by adjusting growth conditions such as a growth temperature, a growth pressure, and a flow amount of source gas.

Next, as illustrated in FIG. 3B, an active layer 25 b and a second conductivity type semiconductor layer 25 c may be sequentially grown on surfaces of the plurality of nanocores 25 a.

Through the process as described above, light emitting nanostructures 25 may have a core-shell structure in which the first conductivity type semiconductor is provided as the nanocores 25 a, and the active layer 25 b and the second conductivity type semiconductor layer 25 c surrounding the respective nanocores 25 a are provided as shell layers.

The active layer 25 b may have a multiple quantum well (MQW) structure in which quantum well layers and quantum barrier layers are alternately stacked, for example, may have an GaN/InGaN structure in the case of a nitride semiconductor. Here, the active layer 25 b may also have a single quantum well (SQW) structure.

The second conductivity type semiconductor layer 25 c may be a crystal satisfying p-type Al_(x)In_(y)Ga_(1-x-y)N. The second conductivity type semiconductor layer 25 c may include an electron blocking layer (not shown) in a portion thereof adjacent to the active layer 25 b. The electron blocking layer (not shown) may have a multilayer structure in which a plurality of layers having different compositions of n-type Al_(x)In_(y)Ga_(1-x-y)N l are stacked or may have at least one layer configured of Al_(y)Ga_((1-y))N. The electron blocking layer (not shown) may have a greater band gap than that of the active layer 25 b to thus prevent electrons from flowing to the second conductivity type (p-type) semiconductor layer 25 c.

As illustrated in FIG. 3B, each of the plurality of nanocores 25 a may include a main part providing side surfaces having first crystal planes in a growth direction and an upper part providing an upper surface having a second crystal plane different from the first crystal planes.

When the base layer 22 is a nitride single crystal including an upper surface having a c-plane, the side surfaces of the main part may be crystal planes perpendicular to the growth surface of the base layer 22, that is, non-polar m-planes, and the upper surface of the upper part may have a c-plane perpendicular to the m-planes. In this manner, the surfaces of the nanocore 15 a may be configured of a plurality of different crystal planes.

Thus, as described above, even in the case in which the active layer 25 b is grown on the surfaces of the nanocore 25 a through the same process, a composition of the active layer 25 b (in particular, the content of indium) maybe different due to differences in characteristics of the respective crystal planes.

Specifically, although the active layer 25 b is grown through the same process, a portion II of the active layer 25 b grown on the upper surface (c-plane) of the nanocore 25 a may have the content of indium lower than that of a portion I of the active layer 25 b grown on the side surfaces (m-planes) of the nanocore 25 a. As a result, the portion II of the active layer 25 b grown on the upper surface (c-plane) of the nanocore 25 a may emit light having a wavelength outside of an intended wavelength range. Thus, in the embodiment, a process of removing a portion of the active layer formed on a crystal plane of the nanocore from which light having a wavelength outside of desired wavelength range may be emitted may be additionally undertaken.

The processes as above described may be illustrated in FIGS. 3C and 3D.

First, a contact electrode 26 may be formed on the light emitting nanostructures 25. In this case, as illustrated in FIG. 3C, the contact electrode 26 may be formed to fill spaces between the light emitting nanostructures 25. In this manner, the filled contact electrode 25 may serve to structurally support the light emitting nanostructures 25 in a subsequent planarizing process.

The contact electrode layer 26 may be obtained by forming a seed layer on the surfaces of the light emitting nanostructures 25 and then performing electroplating thereon. This seed layer may be formed of a material suitable for ohmic contact with the second conductivity semiconductor layer.

As a material for the ohmic contact, GaN, InGaN, ZnO, or a graphene layer may be used. The contact electrode layer 16 may include a material such as Ag, Ni, Al, Rh, Pd, Ir, Ru, Mg, Zn, Pt, Au, or the like and may have a structure of two or more layers, for example, a layer structure of Ni/Ag, Zn/Ag, Ni/Al, Zn/Al, Pd/Ag, Pd/Al, Ir/Ag, Ir/Au, Pt/Ag, Pt/Al, Ni/Ag/Pt, or the like. For example, after sputtering an Ag/Ni/Cr layer as a seed layer, the contact electrode layer 26 may be formed by electroplating Cu/Ni.

The contact electrode layer 26 used in the present embodiment is formed using a reflective metal layer, and it can be understood that light is extracted to the substrate, but the embodiment is not limited thereto. The contact electrode layer 26 may be formed employing a transparent electrode material such as indium tin oxide (ITO) such that light may be extracted to the light emitting nanostructure 25.

The present embodiment illustrates that an electrode material is used as a support for the light emitting nanostructures 25; however, a method of providing a thin contact electrode layer along the surfaces of the light emitting nanostructures and providing a filling material may be implemented. In this case, an insulating filling material may be used as a support for the light emitting nanostructures in a subsequent planarizing process.

Then, a process of performing planarizing to a level L so as to remove a portion of the active layer formed on the upper surface of the nanocore 25 a may be performed. As a result, the portion of the active layer formed on the upper surface of the nanocore 25 a may be removed, and the remaining portions of the active layer 25 b may be formed only on the side surfaces of nanocore 25 a. The side surfaces of the nanocore 25 a may be the same crystal planes, such that the remaining portions of the active layer 25 b may accurately exhibit desired wavelength characteristics.

In the nanocore 25 a, since the side surfaces thereof may generally have a larger area than that of the upper surfaces thereof, effects due to a reduction in a light emitting area may not be significant. In particular, in the case of the nanocore 25 a having a high aspect ratio, improvements in luminescence properties, rather than the effects due to a reduction in a light emitting area may be significant.

In the nanostructure semiconductor light emitting device of FIG. 3D, an electrode may be formed in various structures. FIGS. 4A through 4D are cross-sectional views illustrating respective main processes of an example of an electrode formation process.

As illustrated in FIG. 4A, a passivation layer 27 may be formed on the light emitting nanostructure 25 and further, an upper electrode layer 28 may be formed above the passivation layer 27 so as to be connected to the contact electrode 26.

The passivation layer 27 employed in the embodiment may be formed only on the upper surface of the light emitting nanostructure 25, unlike the passivation layer 17 of the nanostructure semiconductor light emitting device 10 of FIG. 1. The upper electrode layer 26′ may be formed above the passivation layer 27 so as to be connected to the contact electrode 26. The upper electrode layer 26′ may be formed of an electrode material the same as that of a portion of the contact electrode 26.

Next, as illustrated in FIG. 4B, the nanostructure 25 and electrode materials 26 and 26′ positioned in regions in which electrodes having one polarities will be formed may be selectively removed to expose portions e of the base layer 22.

Next, as shown in FIG. 4C, an insulating layer 28 may be formed such that contact regions Ta and Tb of electrodes are exposed. The contact region Ta of a first electrode may be provided as an exposure region of the base layer 12, and the contact region Tb of a second electrode may be provided as a partial region of the upper electrode layer 26′. When the contact electrode 26 maybe exposed through the contact region Tb of the second electrode and the passivation layer 27 is formed of a material that may not be damaged in a selective etching process of the insulating layer 28, the process of forming the upper electrode layer 26′ may be omitted.

Thereafter, as shown in FIG. 4D, first and second electrodes 29 a and 29 b may be formed to be connected to the contact regions Ta and Tb. An electrode material used in the present process may be formed of a common electrode material of the first and second electrodes 29 a and 29 b. For example, a material for the first and second electrodes 29 a and 29 b may be Au, Ag, Al, Ti, W, Cu, Sn, Ni, Pt, Cr, NiSn, TiW, AuSn, or eutectic metals thereof.

The manufacturing method according to the embodiment of the present inventive concept maybe variously modified. For example, a process of filling the nanocore using a mask as a mold structure to grow the nanocore maybe advantageously used. FIGS. 5A through 5H are cross-sectional views illustrating respective main processes of a method of manufacturing a nanostructure semiconductor light emitting device according to another embodiment of the present inventive concept.

As illustrated in FIG. 5A, a base layer 52 may be provided by growing a first conductivity type semiconductor on a substrate 51.

The base layer 52 may provide a crystal growth surface for growing light emitting nanostructures thereon and electrically connect one polarities of the light emitting nanostructures. Therefore, the base layer 52 maybe formed of a semiconductor single crystal having electrical conductivity. In a case in which the base layer 52 is directly grown, the substrate 51 may be a crystal growth substrate.

The base layer 52 may be a nitride semiconductor satisfying Al_(x)In_(y)Ga_(1-x-y)N (0≦x≦1, 0≦y≦1, 0≦x+y≦1) and may be doped with n-type impurities such as silicon (Si). In this case, the substrate 51 may be formed of sapphire, SiC, Si, MgAl₂O₄, MgO, LiAlO₂, LiGaO₂, or GaN.

In a case in which the substrate is formed of silicon, the substrate may be warped or broken due to a difference in coefficients of thermal expansion between Gan and silicon, or the occurrence of defects may be possibly increased due to a difference in lattice constant. Therefore, in this case, since defects need to be suppressed while providing stress control to suppress warping, a buffer layer having a composite structure may be used. For example, on the substrate 51, a crystal not including Ga, such as AlN or SiC, may be used in order to prevent a reaction between Si and Ga, and when a plurality of AlN layers are used, an AlGaN intermediate layer may be inserted therebetween to control stress in the center of GaN.

The substrate 51 may be entirely or partially removed or patterned during a chip manufacturing process to enhance light emission or electrical characteristics of an LED chip, before or after growing an LED structure.

For example, in the case of a sapphire substrate, a laser may be irradiated onto an interface between the substrate and the base layer 52 through the substrate 11 to separate the substrate from the base layer, and a silicon or silicon carbide substrate may be removed through a planarizing method, an etching method, or the like.

In the case that the substrate is removed, a separate support substrate may be used. In the support substrate, a reflective metal may be attached to or a reflective structure may be inserted between junction layers in order to improve light extraction efficiency of an LED chip.

When the substrate is patterned, unevenness or an inclined surface may be formed on main surfaces or both side surfaces of the substrate before or after the growth of a single crystal to improve light extraction efficiency and crystalline properties. The size of a pattern may be selected from a range of 5 nm to 500 μm, and any pattern structure may be used as long as the pattern structure may increase light extraction efficiency using a regular or irregular pattern. The pattern may be variously formed, for example, may have a pillar shape, a peak-and-valley shape, a semispherical shape, or the like.

Next, as shown in FIG. 5B, a mask 53 having a plurality of openings H and an etch stop layer interposed therein may be formed on the base layer 52.

The mask 53 according to the present embodiment may include a first material layer 53 a formed on the base layer 52, and a second material layer 53 b formed on the first material layer 53 a and having an etching rate greater than that of the first material layer 53 a.

The first material layer 53 a may be provided as the etch stop layer. That is, the first material layer 53 a may have an etching rate lower than that of the second material layer 53 b in the same etching conditions. At least the first material layer 53 a may be formed of a material having electrical insulation properties, and the second material layer 53 b may also be formed of an insulating material as needed.

The first and second material layers 53 a and 53 b may be formed of different materials to obtain a required difference in etching rates. For example, the first material layer 53 a may be a SiN layer and the second material layer 53 b may be a SiO₂ layer. Unlike this, such a difference in etching rates may be implemented using pore density. In this case, the first and second material layers 53 a and 53 b may be formed of the same material having different pore densities.

The total thickness of the first and second material layers 53 a and 53 b may be designed in consideration of a desired height of a nanostructure. The first material layer 53 a may have a thickness smaller than that of the second material layer 53 b. An etch stop level through the first material layer 53 a may be positioned at a depth equal to or less than ⅓ of the overall height of the mask 53, that is, the total thickness of the first and second material layers 53 a and 53 b, from the surface of the base layer 52.

The overall height of the mask 53, that is, the total thickness of the first and second material layers 53 a and 53 b may be 10 nm to 100 μm.

After the first and second material layers 53 a and 53 b are sequentially formed on the base layer 52, a plurality of openings H may be formed in the first and second materials layers to expose regions of the base layer 52 therethrough (FIG. 1B). The size of each opening H may be designed in consideration of a desired size of the light emitting nanostructure. For example, the opening H may have a width of 50 nm or less, specifically, 200 nm.

The openings H may be formed through a semiconductor process, for example, a deep-etching process to have a relatively high aspect ratio. The openings H may be implemented to have an aspect ratio of 5:1 or higher, specifically, 10:1 or higher.

Cross-sectional shapes of the openings H and the alignment thereof may be variously implemented. For example, the opening H may have various cross-sectional shapes such as a polygonal shape, a quadrangular shape, an elliptical shape or a circular shape. Although the case in which the opening H shown in FIG. 1B has a rod shape is illustrated, the embodiment is not limited thereto. The opening H maybe variously shaped using an appropriate etching process.

Next, as shown in FIG. 5C, a first conductivity type semiconductor is grown on the exposed regions of the base layer 52 such that the plurality of openings H are filled with the first conductivity type semiconductor, thereby forming a plurality of nanocores 55 a.

The first conductivity type semiconductor of the nanocores 55 a may be an n-type nitride semiconductor, for example, may be a crystal satisfying n-type Al_(x)In_(y)Ga_(1-x-y)N (0≦x≦1, 0≦y≦1, 0≦x+y≦1). The first conductivity type semiconductor configuring the nanocores may be formed of the same material as the first conductivity type semiconductor of the base layer 52. For example, the base layer 52 and the nanocores 55 a may be formed of n-type GaN.

A nitride single crystal configuring the nanocores 55 a may be formed using metal organic chemical vapor deposition (MOCVD) or molecular beam epitaxy (MBE). The mask 53 may serve as a mold for a grown nitride single crystal to provide the nanocores 55 a having shapes corresponding to those of the openings. That is, the nitride single crystal may be selectively grown on regions of the base layer 52 exposed to the openings H by using the mask 53 to fill the openings H therewith. The nitride single crystal selectively grown on regions of the base layer 52 exposed to the openings H may have a form corresponding to those of the openings H.

Next, as shown in FIG. 5D, the mask 53 may be partially removed using the etch stop layer such that side surfaces of the plurality of nanocores 55 a are exposed.

In the present embodiment, an etching process may be performed in such a manner that only the second material layer 53 b may be selectively removed while the first material layer 53 a remains. In the present etching process, the first material layer 53 a may be used as the etch stop layer, and in a subsequent process, the first material layer 53 a may prevent an active layer 55 b and a second conductivity type semiconductor layer 55 c from contacting the base layer 52.

As in the present embodiment, in the process of manufacturing light emitting nanostructures by using a mask provided with openings as a mold, a heat treatment process may be further included to improve crystalline properties. FIG. 5E illustrates a nanocore 55′ that has been heat-treated to have improved crystalline properties.

After removing the mask, a surface of the nanocore 55 a may be subjected to a heat treatment in a predetermined condition such that a crystal plane of the nanocore 55 a may be changed to a stable surface suitable for crystal growth, such as an anti-polar or non-polar crystal plane. Such a process may be explained with reference to FIGS. 6A and 6B.

FIGS. 6A and 6B are mimetic diagrams respectively showing heat treatment processes applied to FIGS. 5D and 5E.

FIG. 6A may illustrate nanocores 55 a obtained in the process of FIG. 5D. Each of the nanocores may have crystal planes determined depending on a cross-sectional shape of an opening. Although the obtained nanocore 55 a has crystal planes determined depending on a cross-sectional shape of the opening, the crystal planes of the nanocore 55 a provided as described above may be relatively unstable, which may be a factor deteriorating a subsequent crystal growth condition.

As in the present embodiment, in a case in which the opening has a cylindrical rod shape, a side surface of the nanocore may have a curved surface rather than a specific crystal plane as shown in FIG. 6A.

When this nanocore is subjected to a heat treatment, unstable crystals on the surface thereof may be re-aligned, such that a stable crystal plane such as in anti-polarity or non-polarity may be formed as illustrated in FIG. 6B. The heat treatment may be performed under a condition of at least 800° C. for several to several tens of minutes, thereby converting an unstable crystal plane into a stable crystal plane.

For example, in a case in which plane C (0001) of the sapphire substrate is grown, the nanocores shown in FIG. 6A may be subjected to a heat treatment at a temperature of 800° C. or above to be then converted into a unstable curved surface, a non-polar surface (an m-plane). A process of stabilizing such a crystal plane may be implemented through a high-temperature heat treatment process. Although it is difficult to clearly explain such a principle, in a case in which crystals positioned on the surface at a relatively high temperature are re-aligned or a source gas remains in a chamber, it can be understand that partial re-growth is performed to have a stable crystal plane through deposition of the remaining source gas.

In particular, in the case of re-growth, a heat treatment process may be performed in an atmosphere in which source gas remains in a chamber, or a heat treatment may be performed in a condition of intentionally supplying a relatively small amount of source gas. For example, as shown in FIG. 6A, in the case of an MOCVD chamber, TMGa and NH₃ remain, and in this residual atmosphere, the heat treatment is performed such that source gas reacts with a nanocore surface to thus realize partial re-growth so as to have a stable crystal plane. Due to the re-growth, the size of nanocore 55 a′ may be slightly increased as shown in FIG. 6B.

As described above, the heat treatment may be performed in the MOCVD in similar conditions to a core formation-conditions after removing the mask and may improve a surface quality of a nanostructure. That is, through the heat treatment process, non-uniformity (for example, a defect or the like) on a surface of a core manufactured after removing the mask may be eliminated, such that a shape of the core can be controlled to have a stable structure, for example, a hexagonal pillar form. A temperature of the heat treatment process as described above may be a temperature similar to a temperature in a core growth condition, for example, 800 to 1200° C.

Next, as illustrated in FIG. 5F, the active layer 55 b and the second conductivity type semiconductor layer 55 c may be sequentially grown on surfaces of the plurality of nanocores 55 a′.

Through the process as described above, light emitting nanostructures 55 may have a core-shell structure in which the first conductivity type semiconductor is provided as the nanocores 55 a, and the active layer 55 b and the second conductivity type semiconductor layer 55 c surrounding the respective nanocores 55 a are provided as shell layers.

The active layer 55 b may have a multiple quantum well (MQW) structure in which quantum well layers and quantum barrier layers are alternately stacked, for example, may have an GaN/InGaN structure in the case of a nitride semiconductor. Here, the active layer 55 b may also have a single quantum well (SQW) structure.

The second conductivity type semiconductor layer 55 c may be a crystal satisfying p-type Al_(x)In_(y)Ga_(1-x-y)N. The second conductivity type semiconductor layer 55 c may include an electron blocking layer (not shown) in a portion thereof adjacent to the active layer 55 b. The electron blocking layer (not shown) may have a multilayer structure in which a plurality of layers having different compositions of n-type Al_(x)In_(y)Ga_(1-x-y)N are stacked or may have at least one layer configured of Al_(y)Ga_((1-y))N. The electron blocking layer (not shown) may have a greater band gap than that of the active layer 55 b to thus prevent electrons from flowing to the second conductivity type (p-type) semiconductor layer 55 c.

Each of the nanocores 55 a may include a main part providing a side surface having a first crystal plane in a growth direction and an upper part providing an upper surface having a second crystal plane different from the first crystal plane.

When the base layer 52 is a nitride single crystal including an upper surface having a c-plane, the side surface of the main part may have a crystal plane perpendicular to the growth surface of the base layer 52, that is, a non-polar m-plane, and the upper surface of the upper part may have an anti-polar r-plane different from the m-plane. In this manner, the surfaces of the nanocore 55 a may be configured of a plurality of different crystal planes.

Thus, as described above, even in the case in which the active layer 55 b is grown on the surfaces of the nanocore 55 a through the same process, a composition of the active layer 55 b (in particular, the content of indium) may be different due to differences in characteristics of the respective crystal planes. Thus, as in FIGS. 5G and 5H, a process of removing a portion of the active layer formed on a crystal plane of the nanocore from which light having a wavelength outside of desired wavelength range may be emitted may be additionally undertaken.

First, a contact electrode 56 may be formed on the light emitting nanostructures 55. In this case, as illustrated in FIG. 3C, the contact electrode 56 may be formed to fill spaces between the light emitting nanostructures 55. In this manner, the filled contact electrode 55 may serve to structurally support the light emitting nanostructures 55 in a subsequent planarizing process.

Then, a process of performing planarizing to a level L so as to remove a portion of the active layer formed on the upper surface of the nanocore 55 a may be performed. As a result, the portion of the active layer formed on the upper surface of the nanocore 55 a may be removed, and the remaining portions of the active layer 55 b may be formed only on the side surfaces of nanocore 55 a. The side surfaces of the nanocore 55 a may be the same crystal planes, such that the remaining portions of the active layer 55 b may accurately exhibit desired wavelength characteristics.

In the nanocore 55 a, since the side surfaces thereof may generally have a larger area than that of the upper surfaces thereof, effects due to a reduction in a light emitting area may not be significant. In particular, in the case of the nanocore 55 a having a high aspect ratio, improvements in luminescence properties, rather than the effects due to a reduction in a light emitting area may be significant.

The above-mentioned present embodiment provides the case in which the mask is configured of two material layers, but the embodiment is not limited thereto. That is, three or more material layers may be employed.

For example, in the case of a mask including first to third material layers sequentially formed on the base layer, the second material layer may be provided as an etch stop layer and may be formed of a material different from those of the first and third material layers. The first and third material layers may be formed of the same material as needed.

Under the same etching conditions, since at least the second material layer has an etching rate lower than that of the third material layer, the second material layer may serve as an etch stop layer. At least the first material layer may be formed of a material having an electrical insulation property, and the second or third material layer or may be formed of an insulating material as necessary.

The above-described embodiment exemplifies a method of manufacturing a nanostructure semiconductor light emitting device, for growing nanocores by using a mask having openings, as a mold. However, the method according to the above-described embodiment may be modified or improved in various embodiments.

In another embodiment, when a nanocore is grown using a mold structure, an upper part of the nanocore may have another shape or a plurality of nanocores may be grown to have different heights, thus causing an uneven structure, and in order to prevent a non-uniform distribution of nanocores from inducing a disadvantageous influence upon a semiconductor light emitting device, a planarizing process maybe further included after forming the plurality of nanocores, such that upper surfaces of the plurality of nanocores maybe planarized to have the same level.

As such, in the process of planarizing the nanocores to have the same level, at least a portion of nanocores among the plurality of nanocores may be designed such that at least one of cross-sectional areas and intervals between the at least a portion of nanocores are different from those of remaining nanocores.

By designing any one of the cross-sectional areas of the light emitting structures and intervals therebetween to be differentiated, even when the same active layer formation process is applied thereto, two or more different wavelengths of light may be emitted. As described above, two or more different wavelengths of light may be emitted by differentiating the design of nanostructures, thereby obtaining white light from a single device. FIGS. 7A through 7F are cross-sectional views illustrating respective main processes of a method of manufacturing a nanostructure semiconductor light emitting device according to another embodiment of the present inventive concept (a planarizing process introduction).

First, as shown in FIG. 7A, a mask 73 having a plurality of openings H and an etch stop layer interposed therein may be formed on a base layer 72 formed on a substrate 71.

The mask 73 according to the present embodiment may include a first material layer 73 a formed on the base layer 72, and a second material layer 73 b formed on the first material layer 73 a and having an etching rate greater than that of the first material layer 73 a.

The openings H may have different shapes. In detail, in the present embodiment, three different groups of openings may be formed. Openings A2 of a second group have an interval d1 therebetween the same as an interval d2 between openings A1 of a first group, and may have a width w2 greater than a width w1 of the openings A1 of the first group. An openings A3 of a third group may have a width w3 the same as the width w1 of the openings A1 of the first group, and the openings A3 of the third group may have an interval d3 therebetween greater than the interval d1 between the openings A1 of the first group.

Substantially, the increase in an interval between the openings indicates a relative increase in a contact amount of source gas with regard to the same area, and thus, a growth speed of nanocores 75 a may be relatively rapid. The increase in a width of the opening indicates a relative reduction in the contact amount of source gas in the same area, and thus, the growth speed of the nanocores 75 a may be relatively slow.

As described above, the nanocores 75 a may have different heights for respective groups, for example, three groups, due to the difference in a growth speed of the nanocores 75 a between the width of the opening and the interval between the openings as shown in FIG. 7B. In order to improve the non-uniform height, planarization to form an appropriate level may be performed in the present process as shown in FIG. 7C, thereby achieving a uniform height of the nanocores 75 a per respective group.

Since the mask 73 is used as a structure supporting the nanocores 75 a in the planarization process as described above, the planarization process may be easily performed without damage to the nanocores 75 a.

After the polarization process, the mask 73 may be partially removed using the etch stop layer to expose side surfaces of the planarized nanocores 75 a as shown in FIG. 7C. That is, in the present process, the second material layer 73 b may only be removed and the first material layer 73 a may remain.

Subsequently, an active layer 75 b and a second conductivity type semiconductor layer 75 c may be sequentially grown on the surfaces of the plurality of nanocores 75 a as shown in FIG. 7D.

Through the above-mentioned process, a light emitting nanostructure 75 may have a core-shell structure in which the first conductivity type semiconductor is provided as the nanocores 75 a, and the active layer 75 b and the second conductivity type semiconductor layer 75 c surrounding the nanocore 75 a are provided as shell layers.

Specifically, although the active layer 55 b is grown through the same process, a portion of the active layer grown on the top surface (c-plane) of the nanocore 75 a may have the content of indium lower than that of a portion of the active layer 55 b grown on the side surfaces (m-planes) of the nanocore 75 a. As a result, the portion of the active layer 75 b grown on the top surface (c-plane) of the nanocore 75 a may emit light having a wavelength outside of an intended wavelength range. Thus, in the embodiment, a process of removing a portion of the active layer formed on a crystal plane of the nanocore from which light having a wavelength outside of desired wavelength range may be emitted may be additionally undertaken. The processes as above described may be illustrated in FIGS. 7E and 7F.

First, a contact electrode 76 may be formed on the light emitting nanostructures 75. In this case, as illustrated in FIG. 7C, the contact electrode 76 may be formed to fill spaces between the light emitting nanostructures 75. In this manner, the filled contact electrode 76 may serve to structurally support the light emitting nanostructures 75 in a subsequent planarizing process.

The contact electrode layer 76 may be obtained by forming a seed layer on the surfaces of the light emitting nanostructures 75 and then performing electroplating thereon. This seed layer may be formed of a material suitable for ohmic contact with the second conductivity semiconductor layer.

The contact electrode layer 76 used in the present embodiment is formed using a reflective metal layer, and it can be understood that light is extracted to the substrate, but the embodiment is not limited thereto. The contact electrode layer 76 may be formed employing a transparent electrode material such as indium tin oxide (ITO) such that light may be extracted to the light emitting nanostructure 75.

The present embodiment illustrates that an electrode material is used as a support for the light emitting nanostructures 75; however, a method of providing a thin contact electrode layer along the surfaces of the light emitting nanostructures and providing a filling material may be implemented. In this case, an insulating filling material may be used as a support for the light emitting nanostructures in a subsequent planarizing process.

Then, a process of performing planarizing to a level L so as to remove a portion of the active layer formed on the upper surface of the nanocore 75 a may be performed. As a result, the portion of the active layer formed on the upper surface of the nanocore 75 a may be removed, and the remaining portions of the active layer 75 b may be formed only on the side surfaces of nanocore 75 a. The side surfaces of the nanocore 75 a may be the same crystal planes, such that the remaining portions of the active layer 75 b may accurately exhibit desired wavelength characteristics.

In the nanocore 75 a, since the side surfaces thereof may generally have a larger area than that of the upper surfaces thereof, effects due to a reduction in a light emitting area may not be significant. In particular, in the case of the nanocore 75 a having a high aspect ratio, improvements in luminescence properties, rather than the effects due to a reduction in a light emitting area may be significant.

The present embodiment illustrates that the light emitting nanostructure has side surfaces perpendicular to the surface of the base layer, but may have side surfaces having a predetermined angle of inclination. Such inclined side surfaces may be advantageous in terms of the extraction of light from the light emitting nanostructure.

The light emitting nanostructure having the inclined side surface may be manufactured in various schemes. For example, in a manufacturing method using a mask as a mold structure, an opening of the mask may be formed to have an appropriate inclined surface to provided a nanocore having an inclined side surface, and an active layer and a second conductivity type semiconductor layer may be grown to have a predetermined thickness, whereby a light emitting nanostructure having a desired inclined side surface may be provided.

More specifically, although the case in which the opening H shown in FIG. 5B has a rod shape is illustrated, the embodiment is not limited thereto. The shape of the opening H may be variously formed using an appropriate etching process. As such examples, FIGS. 8A and 8B illustrate different shapes of openings formed in the masks. In FIG. 8A, a mask 33 formed of first and second material layers 33 a and 33 b may have a pillar shaped opening H having a cross-sectional area gradually increased in an upward direction. In FIG. 38, a mask 33′ formed of first and second material layers 33 a′ and 33 b′ may have a pillar shaped opening H having a cross-sectional area gradually reduced in the upward direction.

Using such a mask, a nanocore having an appropriate inclined surface corresponding to an opening shape and a light emitting nanostructure may be formed.

While the present invention has been shown and described in connection with the embodiments, it will be apparent to those skilled in the art that modifications and variations can be made without departing from the spirit and scope of the present inventive concept as defined by the appended claims. 

What is claimed is:
 1. A nanostructure semiconductor light emitting device, comprising: a base layer including a first conductivity type semiconductor; an insulating layer disposed on the base layer and having a plurality of openings through which regions of the base layer are exposed; and a plurality of light emitting nanostructures respectively disposed on the exposed regions of the base layer and including a plurality of nanocores that include a first conductivity type semiconductor and have side surfaces provided as the same crystal planes, and an active layer and a second conductivity type semiconductor layer, which are sequentially disposed on surfaces of the nanocores, wherein: upper surfaces of the nanocores are provided as portions of upper surfaces of the light emitting nanostructures, and the upper surfaces of the light emitting nanostructures are substantially planar with each other.
 2. The nanostructure semiconductor light emitting device of claim 1, wherein the active layer is disposed only on the side surfaces of the nanocores.
 3. The nanostructure semiconductor light emitting device of claim 1, further comprising: a passivation layer disposed to cover the upper surfaces of the light emitting nanostructures.
 4. The nanostructure semiconductor light emitting device of claim 1, wherein the side surfaces of the nanocores are crystal planes perpendicular to an upper surface of the base layer.
 5. The nanostructure semiconductor light emitting device of claim 4, wherein: the light emitting nanostructures and the base layer include a nitride single crystal, and the side surfaces of the nanocores are non-polar m-planes.
 6. The nanostructure semiconductor light emitting device of claim 1, wherein: a first group of nanocores among the plurality of nanocores have cross-sectional areas different from cross-sectional areas of a second group of nanocores among the plurality of nanocores.
 7. The nanostructure semiconductor light emitting device of claim 6, wherein a third group of nanocores among the plurality of nanocores have an interval therebetween different from an interval between a fourth group of nanocores among the plurality of nanocores.
 8. A method of manufacturing a nanostructure semiconductor light emitting device, the method comprising: growing, by using a first conductivity type semiconductor, a plurality of nanocores on selective portions of a base layer including a first conductivity type semiconductor, such that each of the plurality of nanocore includes a main part that has a side surface having a first crystal plane in a growth direction and an upper part that has a surface having a second crystal plane different from the first crystal plane; forming a plurality of light emitting nanostructures by sequentially growing an active layer and a second conductivity type semiconductor layer on surfaces of the respective nanocores; forming a contact electrode on a surface of the second conductivity type semiconductor layer; and planarizing a surface of the nanostructure semiconductor light emitting device in which the contact electrode is disposed, so as to remove a portion of the active layer disposed on the second crystal plane.
 9. The method of claim 8, wherein the growing of the plurality of nanocores includes: providing the base layer formed of the first conductivity type semiconductor; forming, on the base layer, a mask including an etch stop layer; forming, in the mask, a plurality of openings through which regions of the base layer are exposed; forming the plurality of nanocores by growing the first conductivity type semiconductor on the exposed regions of the base layer so as to fill the plurality of openings with the first conductivity type semiconductor; and partially removing the mask by using the etch stop layer to expose the side surfaces of the plurality of nanocores.
 10. The method of claim 9, wherein the mask includes a first material layer disposed on the base layer and serving as the etch stop layer, and a second material layer disposed on the first material layer and having an etching rate lower than an etching rate of the first material layer.
 11. The method of claim 9, wherein: the mask includes first to third material layers sequentially disposed on the base layer, and the second material layer includes a material different from materials of the first and third material layers and serves as the etch stop layer.
 12. The method of claim 9, further comprising: heat treating the plurality of nanocores after the partially removing of the mask and before the sequentially growing of the active layer and the second conductivity type semiconductor layer.
 13. The method of claim 12, wherein the heat treating of the plurality of nanocores is performed at a temperature ranging from 800 to 1200° C.
 14. The method of claim 9, further comprising: applying a planarizing process to upper surfaces of the plurality of nanocores to be planarized to have an identical level, after the forming of the plurality of nanocores.
 15. The method of claim 14, wherein at least a group of nanocores among the plurality of nanocores have cross-sectional areas or an interval therebetween different from cross-sectional areas of or an interval between another group of nanocores among the plurality of nanocores.
 16. A method of manufacturing a nanostructure semiconductor light emitting device, the method comprising: growing, by using a first conductivity type semiconductor, a plurality of nanocores on selective portions of a base layer including a first conductivity type semiconductor, such that each of the plurality of nanocore includes a main part that has a side surface having a first crystal plane in a growth direction and an upper part that has a surface having a second crystal plane different from the first crystal plane; forming a plurality of light emitting nanostructures by sequentially growing an active layer and a second conductivity type semiconductor layer on surfaces of the respective nanocores; forming a contact electrode on a surface of the second conductivity type semiconductor layer; filling a space between the plurality of light emitting nanostructures with a filling material to cover the plurality of light emitting nanostructures; and planarizing upper surfaces of the plurality of light emitting nanostructures so as to expose upper surfaces of the plurality of the nanocores.
 17. The method of claim 16, wherein the filling material includes an electrode material.
 18. The method of claim 16, wherein the filling material includes an insulating material.
 19. The method of claim 16, wherein the upper surfaces of the light emitting nanostructures are substantially planar with each other, after the planarizing step.
 20. The method of claim 16, wherein the upper surfaces of the light emitting nanostructures are substantially planar with the filling material after the planarizing step. 